ID-Station WIP-Rack
Short features
- RFID system Master / Slave
- LED for status indication
- Available for
- FOUP / FOSB
- 200mm open cassette
- 200mm transport box
- SMIF-Pod
- SMIF-Reticle Pod
- Fast integration on existing racks
- 1 Master reader serves 5 slaves and stocker
Product description
Despite the availability of AMHS in semiconductor fabs there is still a need for WIP racks, buffered carrier close to the tools for the next process steps. The WIP rack reader is dedicated to fit in existing racks.
The WIP Rack Reader will identify the most common carriers in 200 mm and 300 mm fabs. The reading unit is suitable for transport boxes for open cassettes, 200 mm open cassettes, 200 mm SMIF boxes, FOUPs, FOSBs and reticle boxes. Integrated LEDs indicate system status or shows the operator which carrier to pick for the next process step. Single cabling ensures a fast installation within the racks.
The reader consists of one master and up to five slave stations, the master thus serving up to six carrier stations. The WIP rack reader communicates with the host by the SECS/GEM protocol.
Part number
WRM6-E1S-LFF-010 | Master, Ethernet, HSMS, LF, FOUP |
WRS-LFF-010 | Slave, LF, FOUP |
WRM6-E1S-LFR-010 | Master, Ethernet, HSMS, LF, Reticle |
WRS-LFR-010 | Slave, LF, Reticle |
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Specifications
| Dimensions | 320mm x 300mm x 40mm | 12.60" x 11.81" x 1.57" |
| Weight | 3,500 g | 1.10 lbs. |
| Operating temperature | 0°C to 50°C | 32°F to 122°F |
| Storage temperature | -20°C to 70°C | -4°F to 158°F |
| Protection mode | IP40 | |
| Housing | ABS | |
| Fuse type TR% | 500 mA (T) | |
| Voltage | 18 - 30 V DC | |
| Interface | Ethernet | |
| SEMI Standards | E5/ E37/ E99.1/ E144 |